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Graduate Course Proposal Form Submission Detail - EEE6357
Tracking Number - 5396

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Current Status: SCNS Liaison Notified of Graduate Council Approval - 2016-04-21
Campus: Tampa
Submission Type: New
Course Change Information (for course changes only):
Comments: Elective for Elect Eng. To GC. Course is not repeatable. Approved; To USF Sys 4/21/16; to SCNS after 4/28/16

Detail Information

  1. Date & Time Submitted: 2016-02-22
  2. Department: Electrical Engineering
  3. College: EN
  4. Budget Account Number: 2106000
  5. Contact Person: Jessica Procko
  6. Phone: 46318
  7. Email:
  8. Prefix: EEE
  9. Number: 6357
  10. Full Title: Integrated System Technologies
  11. Credit Hours: 3
  12. Section Type: C - Class Lecture (Primarily)
  13. Is the course title variable?: N
  14. Is a permit required for registration?: Y
  15. Are the credit hours variable?: N
  16. Is this course repeatable?: Y
  17. If repeatable, how many times?: 3
  18. Abbreviated Title (30 characters maximum): Integrated System Technologies
  19. Course Online?: C - Face-to-face (0% online)
  20. Percentage Online: 0
  21. Grading Option: R - Regular
  22. Prerequisites: EEE 5356
  23. Corequisites:
  24. Course Description: Advanced fabrication concepts of integrated systems. Students will learn state of the art process techniques, apply simulation tools, and perform and interpret electrical measurements on devices fabricated as part of a laboratory experience.

  25. Please briefly explain why it is necessary and/or desirable to add this course: Replacing Selected Topics with Permanent number; already listed in program
  26. What is the need or demand for this course? (Indicate if this course is part of a required sequence in the major.) What other programs would this course service? This course is part of a sequence course for students in the Microelectronics track in EE. This course has been offered for many years as Advanced IC Technology, which is now an outdated title.
  27. Has this course been offered as Selected Topics/Experimental Topics course? If yes, how many times? Yes, 3 or more times
  28. What qualifications for training and/or experience are necessary to teach this course? (List minimum qualifications for the instructor.) Terminal research degree in the discipline. Research experience associated with material process methods and electrical characterization is useful.
  29. Objectives: Students learn to assess, adapt, and apply appropriate methods to achieve desired component and system characteristics.
  30. Learning Outcomes: Students are able to describe process methods and final device/system function.

    Students describe, develop, and apply process approaches to scale device structures.

    Students apply research methods to discover, model, and instruct others regarding individual and sequenced processes and resulting characteristics.

  31. Major Topics: Process sequences.

    Design rule origins.

    Process evolution through time.

    Etch methods; wet, dry, chemical-physical.

    Vacuum controlled environments.

    Surface dominated processes.

    Device interconnection and physical models.

    Device and Systems Integration Issues.

    Critical assessment and instruction of advanced process methods.

    Process and Characterization laboratory experience.

  32. Textbooks: Introduction to Microelectronic Fabrication 2nd Edition by Richard C. Jaeger (ISBN 0-201-44494-1)
  33. Course Readings, Online Resources, and Other Purchases: Reading will be assigned as needed throughout the course from Library

    holdings and other sources.

  34. Student Expectations/Requirements and Grading Policy: Laboratory – Participation, Reports, and Quizzes: 30%

    Group and Individual Projects, Paper Review: 20%

    Exams (2)— 50%.

  35. Assignments, Exams and Tests: Laboratory – Participation, Reports, and Quizzes: 30%

    Group and Individual Projects, Paper Review: 20%

    Exams (2)— 50%.

  36. Attendance Policy: Course Attendance at First Class Meeting – Policy for Graduate Students: For structured courses, 6000 and above, the College/Campus Dean will set the first-day class attendance requirement. Check with the College for specific information. This policy is not applicable to courses in the following categories: Educational Outreach, Open University (TV), FEEDS Program, Community Experiential Learning (CEL), Cooperative Education Training, and courses that do not have regularly scheduled meeting days/times (such as, directed reading/research or study, individual research, thesis, dissertation, internship, practica, etc.). Students are responsible for dropping undesired courses in these categories by the 5th day of classes to avoid fee liability and academic penalty. (See USF Regulation – Registration - 4.0101,

    Attendance Policy for the Observance of Religious Days by Students: In accordance with Sections 1006.53 and 1001.74(10)(g) Florida Statutes and Board of Governors Regulation 6C-6.0115, the University of South Florida (University/USF) has established the following policy regarding religious observances: (

    In the event of an emergency, it may be necessary for USF to suspend normal operations. During this time, USF may opt to continue delivery of instruction through methods that include but are not limited to: Blackboard, Elluminate, Skype, and email messaging and/or an alternate schedule. It’s the responsibility of the student to monitor Blackboard site for each class for course specific communication, and the main USF, College, and department websites, emails, and MoBull messages for important general information.

  37. Policy on Make-up Work: Students review and sign an EE Department academic integrity policy form, that references the University Policy, at the first meeting that is kept by the instructor for the term then destroyed.

    Late work is not accepted.

  38. Program This Course Supports: Electrical Engineering MSEE/PhD
  39. Course Concurrence Information: Computer Engineering MS,PhD; Chemical and Biomedical Engineering MS, PhD; Physics MS, PhD; Mechanical Engineering MS, PhD; Engineering Science MS.

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