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Graduate Course Proposal Form Submission Detail - EEL6228

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Current Status: SCNS Liaison Notified of Graduate Council Approval - 2016-05-20
Campus: Tampa
Submission Type: New
Course Change Information (for course changes only): Need a permanent number assigned
Comments: Elective for Elect Eng. missing info on form. emailed 3/25/14. To GC. LO need rev. Emailed 3/11/16. Emailed again 5/8/16 with reply deadline of 5/13/16 or will need to resubmit for fall. Updated. Approved 5/20/16 To Sys 5/20/16. To SCNS after 5/27/16

  1. Department and Contact Information

    Tracking Number Date & Time Submitted
    4992 2014-03-20
    Department College Budget Account Number
    Electrical Engineering EN
    Contact Person Phone Email
    Jessica Procko 8139746318

  2. Course Information

    Prefix Number Full Title
    EEL 6228 MEMS I/Chem Bio Sensors

    Is the course title variable? N
    Is a permit required for registration? N
    Are the credit hours variable? N
    Is this course repeatable?
    If repeatable, how many times? 0

    Credit Hours Section Type Grading Option
    3 C - Class Lecture (Primarily) R - Regular
    Abbreviated Title (30 characters maximum)
    MEMS I/Chem Bio Sensors
    Course Online? Percentage Online
    C - Face-to-face (0% online) 0



    Course Description

    Introduction to MEMS, microfabrication techniques and processes as well as basic design principles of biological and chemical Sensors. The course concentrates on basics of MEMS, different processes involved and principles of sensing.

  3. Justification

    A. Please briefly explain why it is necessary and/or desirable to add this course.

    Replacing Selected Topics with Permanent number; already listed in program

    B. What is the need or demand for this course? (Indicate if this course is part of a required sequence in the major.) What other programs would this course service?

    There is a pretty high demand for this course among graduate students from several different departments. Typically, there are 20-30 graduate students enrolled in this course every fall semester. The training of this course not only expose the graduate students to basic concepts of the MEMS and microsystem technologies, but also offers them a pretty solid foundation that would strongly benefits their ongoing and future MS/PhD research projects.

    C. Has this course been offered as Selected Topics/Experimental Topics course? If yes, how many times?

    Yes, 3 or more times

    D. What qualifications for training and/or experience are necessary to teach this course? (List minimum qualifications for the instructor.)

    Terminal Degree required. Aside from the basic knowledge of MEMS and microsystem technologies, the instructor should be competent to offer case studies and detailed discussion on microfabrication processes for micromachined sensors and actuators and more complete microsystems.

  4. Other Course Information

    A. Objectives

    The course is intended for graduate and senior undergraduate students. The course is interdisciplinary in nature, using concepts of physics, chemistry, materials science, electrical engineering and mathematics. While the course does not have any prerequisites, introductory courses in physical/analytical chemistry would be beneficial.

    B. Learning Outcomes

    The students are going to gain enough knowledge through a series of lectures and case studies related to microfabrication processes and basic operation principles of a variety of micromachined sensors and actuators as well as microsystems. The students are also going to learn the latest progresses and trends in the MEMS research field. Moreover, the students are going to learn how to write and judge research proposals based on the MEMS device concepts introduced in this class.

    C. Major Topics

    • To introduce the concept of MEMS and Microsystems.

    • To introduce processes used in MEMS fabrication.

    • To introduce the basic principles of micromachined sensors and actuators.

    • To discuss the limitations and challenges in the design and microfabrication of MEMS sensors and actuators.

    • To discuss selection of sensing modalities (e.g., the type of the MEMS transducers) based on needs and design specifications.

    D. Textbooks

    This course uses the lecture notes developed by the instructor. The following books are used as recommended textbook:

    1. Fundamentals of Microfabrication: The Science of Miniaturization, Marc J. Madou, 2/e, ISBN: 0849308267

    2. Micromachined Transducers – Sourcebook, Gregory T.A. Kovacs, WCB/McGraw Hill, ISBN: 0-07-290722-3.

    3. Microsystem Design – Stephen D. Senturia, Kluwer, 2001, ISBN: 978-0792372462

    E. Course Readings, Online Resources, and Other Purchases

    All the lecture slides and additional reading materials will be posted through the course website. The course does not need other purchases (e.g. lab supplies, instruments, etc.)

    F. Student Expectations/Requirements and Grading Policy

    The following is the grading policy for this course:

    Quizzes –––––––––––––––––––––––––––––––––––––– 15%

    Team research proposal––––––––––––––––––––––––– 20%

    Midterm Exam –––––––––––––––––––––––––––––––– 25%

    Homework Assignments –––––––––––––––––––––––– 10%

    Final Exam ––––––––––––––––––––––––––––––––––– 30%

    G. Assignments, Exams and Tests

    This course is going to have bi-weekly homework assignments throughout the semester. There will be a mid-term exam and a final exam. In addition, the students need to turn in a final term research proposal by applying the basic MEMS device concepts they learnt.

    H. Attendance Policy

    Course Attendance at First Class Meeting – Policy for Graduate Students: For structured courses, 6000 and above, the College/Campus Dean will set the first-day class attendance requirement. Check with the College for specific information. This policy is not applicable to courses in the following categories: Educational Outreach, Open University (TV), FEEDS Program, Community Experiential Learning (CEL), Cooperative Education Training, and courses that do not have regularly scheduled meeting days/times (such as, directed reading/research or study, individual research, thesis, dissertation, internship, practica, etc.). Students are responsible for dropping undesired courses in these categories by the 5th day of classes to avoid fee liability and academic penalty. (See USF Regulation – Registration - 4.0101,

    Attendance Policy for the Observance of Religious Days by Students: In accordance with Sections 1006.53 and 1001.74(10)(g) Florida Statutes and Board of Governors Regulation 6C-6.0115, the University of South Florida (University/USF) has established the following policy regarding religious observances: (

    In the event of an emergency, it may be necessary for USF to suspend normal operations. During this time, USF may opt to continue delivery of instruction through methods that include but are not limited to: Blackboard, Elluminate, Skype, and email messaging and/or an alternate schedule. It’s the responsibility of the student to monitor Blackboard site for each class for course specific communication, and the main USF, College, and department websites, emails, and MoBull messages for important general information.

    I. Policy on Make-up Work

    J. Program This Course Supports

    Electrical Engineering MSEE/PhD

  5. Course Concurrence Information

    This course can service students from Mechanical Engineering, Chemical and Biomedical Engineering and Physics Departments as this course covers interdisciplinary contents.

- if you have questions about any of these fields, please contact or