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Graduate Course Proposal Form Submission Detail - EEL6229
Tracking Number - 4989

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Current Status: SCNS Liaison Notified of Graduate Council Approval - 2016-05-20
Campus: Tampa
Submission Type: New
Course Change Information (for course changes only):
Comments: Elective for Elect. Eng. missing info on form. Faculty emailed. To GC. LO need rev. Emailed 3/11/16. Emailed again 5/8/16 with reply deadline of 5/13/16 or may need to resubmit for fall. Approved 5/20/16. To Sys 5/20/16. To SCNS after 5/27/16

Detail Information

  1. Date & Time Submitted: 2014-03-18
  2. Department: Electrical Engineering
  3. College: EN
  4. Budget Account Number:
  5. Contact Person: Jessica Procko
  6. Phone: 8139746318
  7. Email:
  8. Prefix: EEL
  9. Number: 6229
  10. Full Title: MEMS II
  11. Credit Hours: 3
  12. Section Type: C - Class Lecture (Primarily)
  13. Is the course title variable?: N
  14. Is a permit required for registration?: N
  15. Are the credit hours variable?: N
  16. Is this course repeatable?:
  17. If repeatable, how many times?: 0
  18. Abbreviated Title (30 characters maximum): MEMS II
  19. Course Online?: C - Face-to-face (0% online)
  20. Percentage Online: 0
  21. Grading Option: R - Regular
  22. Prerequisites: EEL 6935–MEMS I: Chem/Bio Sensors and Microfabrication
  23. Corequisites:
  24. Course Description: Hands-on training related to design, simulation and fabrication of MEMS transducers and microsystems. The course concentrates on basics of micromachined sensors and actuators, different processes involved and principles of operation.

  25. Please briefly explain why it is necessary and/or desirable to add this course: Replacing Selected Topics with Permanent number; already listed in program
  26. What is the need or demand for this course? (Indicate if this course is part of a required sequence in the major.) What other programs would this course service? A potential sequence for the MSEE and PHDEE programs. Under the Biomedical Systems and Wireless tracks.
  27. Has this course been offered as Selected Topics/Experimental Topics course? If yes, how many times? Yes, 3 or more times
  28. What qualifications for training and/or experience are necessary to teach this course? (List minimum qualifications for the instructor.) 5. At a minimum, a terminal degree (typically a doctorate) is required to teach graduate courses. What other qualifications, training and/or experience are necessary to teach this course? (List minimum qualifications for the instructor.)

    Aside from the basic knowledge of MEMS and microsystem technologies, the instructor should be competent to offer hands-on trainings about microfabrication processes in a semiconductor cleanroom environment. The instructor should be able to offer tutorials on finite element simulation of MEMS sensors and actuators.

  29. Objectives: The course introduces numerous highly interdisciplinary topics in the field of microelectromechanical systems (MEMS) technologies, using basic concepts of physics, chemistry, materials science, electronics, biology and biomedical devices. This course is dedicated to provide hands-on training of microfabrication of devices and microsystems, and understanding of the fundamental principles of MEMS sensors, transducers and microsystems through finite element simulation and analytical approach. The course aims to introduce research proposal writing exercises and more importantly, to train students to critically review proposals through an organized peer-review process.
  30. Learning Outcomes: students will be able to:

    1.Understand microelectromechanical systems (MEMS) technologies through a series of hands-on laboratory sessions in a real-world cleanroom environment at USF and finite element method (FEM) simulation tutorials.

    2. Independently perform finite element method (FEM) simulation of several MEMS devices, including thermal transducers, beam designs, capacitive sensors and actuators, piezoreisistive membrane pressure sensors, etc.

    3. Carry out some basic designs of microelectromechanical systems (MEMS) transducers and microsystems.

    4. Understand how to properly present their designs by writing a technical report/term paper.

    5. Understand the basic criteria to assess and evaluate a research topic proposals through a peer-review process.

  31. Major Topics: • Design, simulate and model MEMS devices – pressure sensor, micro-mirrors, accelerometer/gyroscope, micro-fluidic channel

    • Introduce and work with several design tools & processing techniques and case studies in MEMS.

    • Build and test (hands-on) a simple MEMS device – piezoresistive pressure sensor

    • Introduce testing methodologies and data analysis techniques

  32. Textbooks: This course uses the lecture notes developed by the instructor. The following books are used as recommended textbook:

    1. Stephen D. Senturia, Microsystem Design, Kluwer, 2001

    2. Micromachined Transducers, Gregory T. A. Kovacs, WCB McGraw-Hill, 1998

  33. Course Readings, Online Resources, and Other Purchases: This course provides hands-on trainings about design of MEMS devices through using design-oriented finite element simulation software. In addition, it offers bi-weekly lab experiments which will be carried out in the cleanroom facility at the Nanotechnology Research and Education Center on USF campus. The license for the simulation software (e.g., Coventorware and COMSOL) needs to renewed on annually or bi-annually basis. In addition, the lab supplies associated with the cleanroom training sessions need to be ordered including silicon wafers, chemicals for wet processes, lab clothes, protection gloves, etc.
  34. Student Expectations/Requirements and Grading Policy: The following is the grading policy for this course:

    Homework: theory (4) + simulation (2) ––––––––––––– 20%

    Team design project (preliminary + final) ––––––––––– 40%

    Exams (2) –––––––––––––––––––––––––––––––––––– 40%

  35. Assignments, Exams and Tests: This course is going to have bi-weekly homework assignments throughout the semester. There will be a mid-term exam and a final exam. In addition, the students need to turn in a final term project report based on what they have learnt in the associated lab sessions.
  36. Attendance Policy: Course Attendance at First Class Meeting – Policy for Graduate Students: For structured courses, 6000 and above, the College/Campus Dean will set the first-day class attendance requirement. Check with the College for specific information. This policy is not applicable to courses in the following categories: Educational Outreach, Open University (TV), FEEDS Program, Community Experiential Learning (CEL), Cooperative Education Training, and courses that do not have regularly scheduled meeting days/times (such as, directed reading/research or study, individual research, thesis, dissertation, internship, practica, etc.). Students are responsible for dropping undesired courses in these categories by the 5th day of classes to avoid fee liability and academic penalty. (See USF Regulation – Registration - 4.0101,

    Attendance Policy for the Observance of Religious Days by Students: In accordance with Sections 1006.53 and 1001.74(10)(g) Florida Statutes and Board of Governors Regulation 6C-6.0115, the University of South Florida (University/USF) has established the following policy regarding religious observances: (

    In the event of an emergency, it may be necessary for USF to suspend normal operations. During this time, USF may opt to continue delivery of instruction through methods that include but are not limited to: Blackboard, Elluminate, Skype, and email messaging and/or an alternate schedule. It’s the responsibility of the student to monitor Blackboard site for each class for course specific communication, and the main USF, College, and department websites, emails, and MoBull messages for important general information.

  37. Policy on Make-up Work:
  38. Program This Course Supports: Electrical Engineering
  39. Course Concurrence Information: This course can service students from Mechanical Engineering, Chemical and Biomedical Engineering and Physics Departments as this course covers interdisciplinary contents.

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