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Graduate Course Proposal Form Submission Detail - EEE6464

(password required)

Current Status: -
Campus: Tampa
Submission Type: New
Course Change Information (for course changes only):

  1. Department and Contact Information

    Tracking Number Date & Time Submitted
    4953 2014-02-18
    Department College Budget Account Number
    Electrical Engineering EN 02106000
    Contact Person Phone Email
    Jing Wang 8139746011

  2. Course Information

    Prefix Number Full Title
    EEE 6464 Microelectromechanical Systems II

    Is the course title variable? N
    Is a permit required for registration? N
    Are the credit hours variable? N
    Is this course repeatable? N
    If repeatable, how many times? 0

    Credit Hours Section Type Grading Option
    3 C - Class Lecture (Primarily) R - Regular
    Abbreviated Title (30 characters maximum)
    Course Online? Percentage Online
    C - Face-to-face (0% online) 5


    EEL 6935–MEMS I



    Course Description

    This course offers hands-on training related to design, simulation and fabrication of MEMS transducers and microsystems. The course concentrates on basics of micromachined sensors and actuators, different processes involved and principles of operation.

  3. Justification

    A. Please briefly explain why it is necessary and/or desirable to add this course.

    Replacing Selected Topics with Permanent number; already listed in program

    B. What is the need or demand for this course? (Indicate if this course is part of a required sequence in the major.) What other programs would this course service?

    As an important element of this course, students are going to learn the processing steps of MEMS sensor microfabrication by participating in bi-weekly lab experiments that can be carried out in the Nanotechnology Research and Education Center (NREC) on campus that is a multi-user shared facility. It is however necessary to collect fees from students enrolled in this class to cover the cost of materials and supplies.

    C. Has this course been offered as Selected Topics/Experimental Topics course? If yes, how many times?

    Yes, 3 or more times

    D. What qualifications for training and/or experience are necessary to teach this course? (List minimum qualifications for the instructor.)

    Aside from the basic knowledge of MEMS and microsystem technologies, the instructor should be competent to offer hands-on trainings about microfabrication processes in a semiconductor cleanroom environment. The instructor should be able to offer tutorials on finite element simulation of MEMS sensors and actuators.

  4. Other Course Information

    A. Objectives

    The course is intended for graduate students. The course is interdisciplinary in nature, using concepts of physics, chemistry, materials science, electrical engineering and mathematics. The course is dedicated to provide hands-on training of microfabrication of MEMS devices, and understanding fundamentals of sensors and microsystems through finite element simulation and analytical approach. The course also aims to introduce writing research proposals and more importantly, to critically review proposals and rate them.

    B. Learning Outcomes

    The students are going to gain enough knowledge through a series of hands-on trainings in a real-world cleanroom environment and finite element device simulation tutorials to be able to carry out some basic designs of MEMS transducers and microsystems. They will also learn how to properly present their designs by writing a technical report.

    C. Major Topics

    • Design, simulate and model MEMS devices – pressure sensor, micro-mirrors, accelerometer/gyroscope, micro-fluidic channel

    • Introduce and work with several design tools & processing techniques and case studies in MEMS.

    • Build and test (hands-on) a simple MEMS device – piezoresistive pressure sensor

    • Introduce testing methodologies and data analysis techniques

    D. Textbooks

    This course uses the lecture notes developed by the instructor. The following books are used as recommended textbook:

    1. Stephen D. Senturia, Microsystem Design, Kluwer, 2001

    2. Micromachined Transducers, Gregory T. A. Kovacs, WCB McGraw-Hill, 1998

    E. Course Readings, Online Resources, and Other Purchases

    This course provides hands-on trainings about design of MEMS devices through using design-oriented finite element simulation software. In addition, it offers bi-weekly lab experiments which will be carried out in the cleanroom facility at the Nanotechnology Research and Education Center on USF campus. The license for the simulation software (e.g., Coventorware and COMSOL) needs to renewed on annually or bi-annually basis. In addition, the lab supplies associated with the cleanroom training sessions need to be ordered including silicon wafers, chemicals for wet processes, lab clothes, protection gloves, etc.

    F. Student Expectations/Requirements and Grading Policy

    The following is the grading policy for this course:

    Homework: theory (4) + simulation (2) ––––––––––––– 20%

    Team design project (preliminary + final) ––––––––––– 40%

    Exams (2) –––––––––––––––––––––––––––––––––––– 40%

    G. Assignments, Exams and Tests

    This course is going to have bi-weekly homework assignments throughout the semester. There will be a mid-term exam and a final exam. In addition, the students need to turn in a final term project report based on what they have learnt in the associated lab sessions.

    H. Attendance Policy

    Course Attendance at First Class Meeting – Policy for Graduate Students: For structured courses, 6000 and above, the College/Campus Dean will set the first-day class attendance requirement. Check with the College for specific information. This policy is not applicable to courses in the following categories: Educational Outreach, Open University (TV), FEEDS Program, Community Experiential Learning (CEL), Cooperative Education Training, and courses that do not have regularly scheduled meeting days/times (such as, directed reading/research or study, individual research, thesis, dissertation, internship, practica, etc.). Students are responsible for dropping undesired courses in these categories by the 5th day of classes to avoid fee liability and academic penalty. (See USF Regulation – Registration - 4.0101,

    Attendance Policy for the Observance of Religious Days by Students: In accordance with Sections 1006.53 and 1001.74(10)(g) Florida Statutes and Board of Governors Regulation 6C-6.0115, the University of South Florida (University/USF) has established the following policy regarding religious observances: (

    In the event of an emergency, it may be necessary for USF to suspend normal operations. During this time, USF may opt to continue delivery of instruction through methods that include but are not limited to: Blackboard, Elluminate, Skype, and email messaging and/or an alternate schedule. It’s the responsibility of the student to monitor Blackboard site for each class for course specific communication, and the main USF, College, and department websites, emails, and MoBull messages for important general information.

    I. Policy on Make-up Work

    Make up work could be offered based on individual and extenuating circumstances. Academic integrity is the foundation of the University of

    South Florida System’s (USF System) commitment to the academic honesty and personal integrity of its University community. Academic integrity is grounded in certain fundamental values, which include

    honesty, respect and fairness. Broadly defined, academic honesty is the completion of all academic endeavors and claims of scholarly knowledge as representative of one’s own efforts.Knowledge and maintenance of the academic standards of honesty and integrity as set forth by the

    University are the responsibility of the entire academic community, including the instructional faculty, staff and students.The final decision on an academic integrity violation and related sanction at any USF System member institution shall affect and be applied to the academic status

    of the student throughout the USF System

    J. Program This Course Supports

    Electrical Engineering Masters/Doctoral Programs

  5. Course Concurrence Information

    This course can service students from Mechanical Engineering, Chemical and Biomedical Engineering and Physics Departments as this course covers interdisciplinary contents.

- if you have questions about any of these fields, please contact or