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Graduate Course Proposal Form Submission Detail - EML6290

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Current Status: Approved by SCNS - 2013-01-29
Campus: Tampa
Submission Type: New
Course Change Information (for course changes only):
Comments: to GC 12/3/12 - Mech Eng (all masters and Ph.D.) - Elective course option. Missing Textbook info. Emailed 12/4/12. Cleared 12/6. GC approved 12/6. to SYS 12/12. to SCNS 12/20. Approved eff 2/1/13. Nmbr 6299 approved as 6290

  1. Department and Contact Information

    Tracking Number Date & Time Submitted
    2981 2012-10-17
    Department College Budget Account Number
    Mechanical Engineering EN 10000 210500 000000 0000000
    Contact Person Phone Email
    Dr. Ashok Kumar 8139743942

  2. Course Information

    Prefix Number Full Title
    EML 6290 Micro and Nano Manufacturing

    Is the course title variable? N
    Is a permit required for registration? N
    Are the credit hours variable? N
    Is this course repeatable?
    If repeatable, how many times? 0

    Credit Hours Section Type Grading Option
    3 C - Class Lecture (Primarily) -
    Abbreviated Title (30 characters maximum)
    Micro and Nano Manufacturing
    Course Online? Percentage Online
    C - Face-to-face (0% online) 0


    EGN 3365


    Course Description

    Covers the fundamental understanding of design, fabrication, and applications of microelectromechanical systems (MEMS) and nanomanufacturing processes including sensing and actuation of mechanical, optical and microfluidic devices with case st

  3. Justification

    A. Please briefly explain why it is necessary and/or desirable to add this course.

    Offered as enrichment course (not part of program/concentration/certificate)

    B. What is the need or demand for this course? (Indicate if this course is part of a required sequence in the major.) What other programs would this course service?

    This class would serve a technical elective for graduate students interested in MEMS and nanomanufacturing, and related fields. Currently, there is no appropriate course for Mechanical Engineering students to take that would expose them to further concepts in design, fabrication, processes, and applications of micro and nano scale devices. The strong demand for MEMS and Nanomanufacturing by a rapidly growing market has generated strong interest and there is a need for students to acquire the necessary knowledge and experience in the design and manufacture of multifunctional micro and nano devices. This class would enable interested students to further pursue these academic interests. This class would serve most departments in the College of Engineering including Physics department in the College of Arts and Sciences. This course has been offered more than three times, an average of 20 students took the course.

    C. Has this course been offered as Selected Topics/Experimental Topics course? If yes, how many times?

    Yes, 3 or more times

    D. What qualifications for training and/or experience are necessary to teach this course? (List minimum qualifications for the instructor.)

    Doctorate or Master degree in Engineering

  4. Other Course Information

    A. Objectives

    The objective of this course is to provide graduate students in mechanical, materials, electrical, manufacturing, and related engineering disciplines with necessary fundamental knowledge and experience in the design, manufacture, and packaging of micro and nano systems. Micro and nano manufacturing introduces science and engineering students of many disciplines to discover how manufacturing processes enable the development of microelectromechanical systems ( MEMS) and nano devices in areas other than the microelectronic industries. This course intends to develop an understanding of how MEMS and nano devices are manufactured and to allow students to help design next generation devices by understanding how manufacturing processes contribute to device development. Students will get also hands-on experience to fabricate a simple sensor device using nanofabrication technologies.

    B. Learning Outcomes

    Students will gain critical cross-disciplinary knowledge about designing and fabrication of MEMS and nanomanufacturing for multifunction al applications. As a result, the students should able to analyze the key performance aspects of simple micro and nano scale devices and understand the options and challenges associated with a particular design and processing task. Student will attain a solid background in the area of microfabrication and will be able to critically judge a fabrication process and synthesize a new one for future applications. Students will be experienced with communally practiced design and fabrication processes of both micro and nano through studies of cases. Students will obtain the analytical and practical know-how to evaluate many interesting points-design, fabrication, performance, robustness, and cost, among others involved in successfully developing integrated micro and nano scale devices.

    C. Major Topics

    Major course topics consist of the overview of MEMS and nanotechnology, materials for MEMS microsystems and nanomanufacturing, microsystem fabrication processes, engineering mechanics for microsystem design, micromanufacturing (bulk micromanufacturing, surface micromachining, LIGA processes), fundamentals of nanomanufacturing processes (nanolithography, quantum wire and dots, self-Assembly etc.,), introduction of nanotechnology, nanomechanical and nanotribology, sensing and actuation of mechanical, optical and microfluidic devices, case studies related to the proposed topics.

    D. Textbooks

    MEMS & Microsystems – Design and Manufacture, Nanoscale Engineering by Tai-Ran Hsu, Second Edition (ISBN 978-0-470-08301-7), John Wiley & Sons, Inc. (2008)

    E. Course Readings, Online Resources, and Other Purchases

    As part of this course, the students will be involved in lab related activities at the Nanotechnology Research and Education Center (NREC). The NREC will provide all the necessary materials and supplies. Lab fees generated from this course will be used to purchase materials and supplies from the NREC to run the lab as part of the course.

    F. Student Expectations/Requirements and Grading Policy

    Homework (15%): There will be regular homework, some of will be assigned from the textbook. Short Quizzes (20%): There will be several quizzes throughout the semester, which will be announced ahead of time. Tests (30%); Two tests will be conducted for this course. The first test (15%) will held sometime during the middle of the semester and students will be asked to answer both numerical and descriptive type of questions. The final test (15%) will held at the end of the semester and the format of questions will be same as test I. Lab (20%): There will be approx. five to six lab sessions and students will have hands-on experiences to fabricate a simple micro/nano device. Students are expected to write a lab report. There will be also two quizzes related to the lab activities. Term Project (15%): There will be one team-based term project. Students will choose the appropriate term paper topic with consultation from the instructor. Students are expected to write a report and also present the term project during the last day of class.

    G. Assignments, Exams and Tests

    There are approximately 4 quizzes, 6 homework assignments, and 2 tests throughout the semester.

    H. Attendance Policy

    Course Attendance at First Class Meeting – Policy for Graduate Students: For structured courses, 6000 and above, the College/Campus Dean will set the first-day class attendance requirement. Check with the College for specific information. This policy is not applicable to courses in the following categories: Educational Outreach, Open University (TV), FEEDS Program, Community Experiential Learning (CEL), Cooperative Education Training, and courses that do not have regularly scheduled meeting days/times (such as, directed reading/research or study, individual research, thesis, dissertation, internship, practica, etc.). Students are responsible for dropping undesired courses in these categories by the 5th day of classes to avoid fee liability and academic penalty. (See USF Regulation – Registration - 4.0101,

    Attendance Policy for the Observance of Religious Days by Students: In accordance with Sections 1006.53 and 1001.74(10)(g) Florida Statutes and Board of Governors Regulation 6C-6.0115, the University of South Florida (University/USF) has established the following policy regarding religious observances: (

    In the event of an emergency, it may be necessary for USF to suspend normal operations. During this time, USF may opt to continue delivery of instruction through methods that include but are not limited to: Blackboard, Elluminate, Skype, and email messaging and/or an alternate schedule. It’s the responsibility of the student to monitor Blackboard site for each class for course specific communication, and the main USF, College, and department websites, emails, and MoBull messages for important general information.

    I. Policy on Make-up Work

    NO make-ups will be given for quizzes, homeworks, projects, or presentations unless the student is seriously ill, a death in the family, or other legitimate, documented family emergency. Notification of absence must be given prior to the scheduled assignment due date.

    J. Program This Course Supports

    Mechanical Engineering

  5. Course Concurrence Information

    Electrical Engineering

    Materials Science & Engineering

    Chemical Engineering

    Industrial Engineering


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