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Graduate Course Proposal Form Submission Detail - EEL6073

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Current Status: Approved, Permanent Archive - 2006-12-05
Submission Type:
Course Change Information (for course changes only):

  1. Department and Contact Information

    Tracking Number Date & Time Submitted
    1793 2006-01-23
    Department College Budget Account Number
    Electrical Engineering EN 2106000000
    Contact Person Phone Email
    Shekhar Bhansali 43593

  2. Course Information

    Prefix Number Full Title
    EEL 6073 Chemical/Biological Sensors and Microfabrication

    Is the course title variable? N
    Is a permit required for registration? N
    Are the credit hours variable? N
    Is this course repeatable?
    If repeatable, how many times? 0

    Credit Hours Section Type Grading Option
    3 C - Class Lecture (Primarily) R - Regular
    Abbreviated Title (30 characters maximum)
    Chem Bio Sens Microfab
    Course Online? Percentage Online





    Course Description

    Discusses general concepts of MEMS, microfabrication and chem/bio sensors. The course concentrates on basics of MEMS, different processes involved and principles of sensing and understanding systems approaches to problems that require Sensors/MEMS.

  3. Justification

    A. Please briefly explain why it is necessary and/or desirable to add this course.

    The course has been offered three times as a special topics course with a graduate enrollment between 20 and 30 students including students on APEX. It addresses a critical new technological development

    B. What is the need or demand for this course? (Indicate if this course is part of a required sequence in the major.) What other programs would this course service?

    The course is a core course for IGERT students. The course attracts students from physics, chemistry, all engineering departments and college of medicine

    C. Has this course been offered as Selected Topics/Experimental Topics course? If yes, how many times?

    yes 3 times

    D. What qualifications for training and/or experience are necessary to teach this course? (List minimum qualifications for the instructor.)

    Ph.D or M.S. with 3-5 years of experince in the field

  4. Other Course Information

    A. Objectives

    To introduce the concept of MEMS and Microsystems

    To introduce processes that are used in MEMS fabrication.

    To introduce the basic principles of micromachined sensors and sensing modalities.

    To discuss the limitations and challenges in the design and fabrication of micro-sensors.

    Discuss selection of sensing modalities based on needs

    To introduce students to writing research proposals enabling them to apply general micromachining principles to build novel devices

    B. Learning Outcomes

    Student understands fabrication processes

    Learns to develop fabrication strategies based on infrastructure

    Understands functioning of electrochemical sensors

    C. Major Topics

    Crystallographic studies (1)

    Structure of Si, Crystallographic planes and directions. Angles between planes, Importance of crystallography to bulk micromachining

    Lithography (1)

    Fundamentals of optics and image transfer; lithographic techniques; resists; limits of lithography

    Micromachining (1)

    Bulk micromachining-Oxidation, Wet Etching, Dry etching/reactive ion etching, Porous Si etching, novel approaches to etching

    Oxidation / Diffusion (1)

    Surface Micromachining (1)

    Thin film processes (physical, chemical); electroplating

    Introduction to Chem/Bio sensors and principles of sensing (1)

    Electrochemical sensors (2)

    Fabrication of MEMS devices and sensors(5)

    Packaging (1)

    Applications in context of biological Systems/skin (2)

    D. Textbooks

    GTA Kovacs Micromachined Transducers Source book


    E. Course Readings, Online Resources, and Other Purchases

    F. Student Expectations/Requirements and Grading Policy

    G. Assignments, Exams and Tests

    H. Attendance Policy

    I. Policy on Make-up Work

    J. Program This Course Supports

  5. Course Concurrence Information

- if you have questions about any of these fields, please contact or