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Graduate Course Proposal Form Submission Detail - EEL6073
Tracking Number - 1793

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Current Status: Approved, Permanent Archive - 2006-12-05
Submission Type:
Course Change Information (for course changes only):

Detail Information

  1. Date & Time Submitted: 2006-01-23
  2. Department: Electrical Engineering
  3. College: EN
  4. Budget Account Number: 2106000000
  5. Contact Person: Shekhar Bhansali
  6. Phone: 43593
  7. Email:
  8. Prefix: EEL
  9. Number: 6073
  10. Full Title: Chemical/Biological Sensors and Microfabrication
  11. Credit Hours: 3
  12. Section Type: C - Class Lecture (Primarily)
  13. Is the course title variable?: N
  14. Is a permit required for registration?: N
  15. Are the credit hours variable?: N
  16. Is this course repeatable?:
  17. If repeatable, how many times?: 0
  18. Abbreviated Title (30 characters maximum): Chem Bio Sens Microfab
  19. Course Online?: -
  20. Percentage Online:
  21. Grading Option: R - Regular
  22. Prerequisites: none
  23. Corequisites: none
  24. Course Description: Discusses general concepts of MEMS, microfabrication and chem/bio sensors. The course concentrates on basics of MEMS, different processes involved and principles of sensing and understanding systems approaches to problems that require Sensors/MEMS.

  25. Please briefly explain why it is necessary and/or desirable to add this course: The course has been offered three times as a special topics course with a graduate enrollment between 20 and 30 students including students on APEX. It addresses a critical new technological development
  26. What is the need or demand for this course? (Indicate if this course is part of a required sequence in the major.) What other programs would this course service? The course is a core course for IGERT students. The course attracts students from physics, chemistry, all engineering departments and college of medicine
  27. Has this course been offered as Selected Topics/Experimental Topics course? If yes, how many times? yes 3 times
  28. What qualifications for training and/or experience are necessary to teach this course? (List minimum qualifications for the instructor.) Ph.D or M.S. with 3-5 years of experince in the field
  29. Objectives: To introduce the concept of MEMS and Microsystems

    To introduce processes that are used in MEMS fabrication.

    To introduce the basic principles of micromachined sensors and sensing modalities.

    To discuss the limitations and challenges in the design and fabrication of micro-sensors.

    Discuss selection of sensing modalities based on needs

    To introduce students to writing research proposals enabling them to apply general micromachining principles to build novel devices

  30. Learning Outcomes: Student understands fabrication processes

    Learns to develop fabrication strategies based on infrastructure

    Understands functioning of electrochemical sensors

  31. Major Topics: Crystallographic studies (1)

    Structure of Si, Crystallographic planes and directions. Angles between planes, Importance of crystallography to bulk micromachining

    Lithography (1)

    Fundamentals of optics and image transfer; lithographic techniques; resists; limits of lithography

    Micromachining (1)

    Bulk micromachining-Oxidation, Wet Etching, Dry etching/reactive ion etching, Porous Si etching, novel approaches to etching

    Oxidation / Diffusion (1)

    Surface Micromachining (1)

    Thin film processes (physical, chemical); electroplating

    Introduction to Chem/Bio sensors and principles of sensing (1)

    Electrochemical sensors (2)

    Fabrication of MEMS devices and sensors(5)

    Packaging (1)

    Applications in context of biological Systems/skin (2)

  32. Textbooks: GTA Kovacs Micromachined Transducers Source book


  33. Course Readings, Online Resources, and Other Purchases:
  34. Student Expectations/Requirements and Grading Policy:
  35. Assignments, Exams and Tests:
  36. Attendance Policy:
  37. Policy on Make-up Work:
  38. Program This Course Supports:
  39. Course Concurrence Information:

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