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Graduate Course Proposal Form Submission Detail - EEL6073
Tracking Number - 1793

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Current Status: Approved, Permanent Archive - 2006-12-05
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Detail Information

  1. Date & Time Submitted: 2006-01-23
  2. Department: Electrical Engineering
  3. College: EN
  4. Budget Account Number: 2106000000
  5. Contact Person: Shekhar Bhansali
  6. Phone: 43593
  7. Email: bhansali@eng.usf.edu
  8. Prefix: EEL
  9. Number: 6073
  10. Full Title: Chemical/Biological Sensors and Microfabrication
  11. Credit Hours: 3
  12. Section Type: C - Class Lecture (Primarily)
  13. Is the course title variable?: N
  14. Is a permit required for registration?: N
  15. Are the credit hours variable?: N
  16. Is this course repeatable?:
  17. If repeatable, how many times?: 0
  18. Abbreviated Title (30 characters maximum): Chem Bio Sens Microfab
  19. Course Online?: -
  20. Percentage Online:
  21. Grading Option: R - Regular
  22. Prerequisites: none
  23. Corequisites: none
  24. Course Description: Discusses general concepts of MEMS, microfabrication and chem/bio sensors. The course concentrates on basics of MEMS, different processes involved and principles of sensing and understanding systems approaches to problems that require Sensors/MEMS.

  25. Please briefly explain why it is necessary and/or desirable to add this course: The course has been offered three times as a special topics course with a graduate enrollment between 20 and 30 students including students on APEX. It addresses a critical new technological development
  26. What is the need or demand for this course? (Indicate if this course is part of a required sequence in the major.) What other programs would this course service? The course is a core course for IGERT students. The course attracts students from physics, chemistry, all engineering departments and college of medicine
  27. Has this course been offered as Selected Topics/Experimental Topics course? If yes, how many times? yes 3 times
  28. What qualifications for training and/or experience are necessary to teach this course? (List minimum qualifications for the instructor.) Ph.D or M.S. with 3-5 years of experince in the field
  29. Objectives: • To introduce the concept of MEMS and Microsystems

    • To introduce processes that are used in MEMS fabrication.

    • To introduce the basic principles of micromachined sensors and sensing modalities.

    • To discuss the limitations and challenges in the design and fabrication of micro-sensors.

    • Discuss selection of sensing modalities based on needs

    • To introduce students to writing research proposals enabling them to apply general micromachining principles to build novel devices

  30. Learning Outcomes: Student understands fabrication processes

    Learns to develop fabrication strategies based on infrastructure

    Understands functioning of electrochemical sensors

  31. Major Topics: • Crystallographic studies (1)

    Structure of Si, Crystallographic planes and directions. Angles between planes, Importance of crystallography to bulk micromachining

    • Lithography (1)

    Fundamentals of optics and image transfer; lithographic techniques; resists; limits of lithography

    • Micromachining (1)

    Bulk micromachining-Oxidation, Wet Etching, Dry etching/reactive ion etching, Porous Si etching, novel approaches to etching

    • Oxidation / Diffusion (1)

    • Surface Micromachining (1)

    Thin film processes (physical, chemical); electroplating

    • Introduction to Chem/Bio sensors and principles of sensing (1)

    Electrochemical sensors (2)

    • Fabrication of MEMS devices and sensors(5)

    • Packaging (1)

    • Applications in context of biological Systems/skin (2)

  32. Textbooks: GTA Kovacs Micromachined Transducers Source book

    Handouts

  33. Course Readings, Online Resources, and Other Purchases:
  34. Student Expectations/Requirements and Grading Policy:
  35. Assignments, Exams and Tests:
  36. Attendance Policy:
  37. Policy on Make-up Work:
  38. Program This Course Supports:
  39. Course Concurrence Information:


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