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Graduate Course Proposal Form Submission Detail - EEL6073
Tracking Number - 1793
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Current Status:
Approved, Permanent Archive - 2006-12-05
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Detail Information
- Date & Time Submitted: 2006-01-23
- Department: Electrical Engineering
- College: EN
- Budget Account Number: 2106000000
- Contact Person: Shekhar Bhansali
- Phone: 43593
- Email: bhansali@eng.usf.edu
- Prefix: EEL
- Number: 6073
- Full Title: Chemical/Biological Sensors and Microfabrication
- Credit Hours: 3
- Section Type: C -
Class Lecture (Primarily)
- Is the course title variable?: N
- Is a permit required for registration?: N
- Are the credit hours variable?: N
- Is this course repeatable?:
- If repeatable, how many times?: 0
- Abbreviated Title (30 characters maximum): Chem Bio Sens Microfab
- Course Online?: -
- Percentage Online:
- Grading Option:
R - Regular
- Prerequisites: none
- Corequisites: none
- Course Description: Discusses general concepts of MEMS, microfabrication and chem/bio sensors. The course concentrates on basics of MEMS, different processes involved and principles of sensing and understanding systems approaches to problems that require Sensors/MEMS.
- Please briefly explain why it is necessary and/or desirable to add this course: The course has been offered three times as a special topics course with a graduate enrollment between 20 and 30 students including students on APEX. It addresses a critical new technological development
- What is the need or demand for this course? (Indicate if this course is part of a required sequence in the major.) What other programs would this course service? The course is a core course for IGERT students. The course attracts students from physics, chemistry, all engineering departments and college of medicine
- Has this course been offered as Selected Topics/Experimental Topics course? If yes, how many times? yes 3 times
- What qualifications for training and/or experience are necessary to teach this course? (List minimum qualifications for the instructor.) Ph.D or M.S. with 3-5 years of experince in the field
- Objectives: • To introduce the concept of MEMS and Microsystems
• To introduce processes that are used in MEMS fabrication.
• To introduce the basic principles of micromachined sensors and sensing modalities.
• To discuss the limitations and challenges in the design and fabrication of micro-sensors.
• Discuss selection of sensing modalities based on needs
• To introduce students to writing research proposals enabling them to apply general micromachining principles to build novel devices
- Learning Outcomes: Student understands fabrication processes
Learns to develop fabrication strategies based on infrastructure
Understands functioning of electrochemical sensors
- Major Topics: • Crystallographic studies (1)
Structure of Si, Crystallographic planes and directions. Angles between planes, Importance of crystallography to bulk micromachining
• Lithography (1)
Fundamentals of optics and image transfer; lithographic techniques; resists; limits of lithography
• Micromachining (1)
Bulk micromachining-Oxidation, Wet Etching, Dry etching/reactive ion etching, Porous Si etching, novel approaches to etching
• Oxidation / Diffusion (1)
• Surface Micromachining (1)
Thin film processes (physical, chemical); electroplating
• Introduction to Chem/Bio sensors and principles of sensing (1)
Electrochemical sensors (2)
• Fabrication of MEMS devices and sensors(5)
• Packaging (1)
• Applications in context of biological Systems/skin (2)
- Textbooks: GTA Kovacs Micromachined Transducers Source book
Handouts
- Course Readings, Online Resources, and Other Purchases:
- Student Expectations/Requirements and Grading Policy:
- Assignments, Exams and Tests:
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- Program This Course Supports:
- Course Concurrence Information:
- if you have questions about any of these fields, please contact chinescobb@grad.usf.edu or joe@grad.usf.edu.